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PH3-A1 Phosphine Sensor (PH3 Sensor)
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Product Details
Brand Name: | Alphasense | Place of Origin: | United Kingdom | Model Number: | PH3-A1 |
Usage: | Gas Sensor | Theory: | Other, Electrochemical Gas Sensor | Output: | Analog Sensor |
Product Description
PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.
Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.
PH3-A1 Phosphine Sensor PH3 Sensor Schematic Diagram
PH3-A1 Phosphine Sensor PH3 Sensor PERFORMANCE | ||
Sensitivity | nA/ppm in 11ppm PH3 | 550 to 900 |
Response time | t90 (s) from zero to 5ppm PH3 | <25 |
Zero current | ppm equivalent in zero air | <±0.3 |
Resolution | RMS noise (ppm equivalent) | <0.03 |
Range | ppm PH3 limit of performance warranty | 10 |
Linearity | ppm error at full scale, linear at zero, 20ppm PH3 | <-0.6 |
Overgas limit | maximum ppm for stable response to gas pulse | 75 |
PH3-A1 Phosphine Sensor PH3 Sensor LIFETIME | ||
Zero drift | ppm equivalent change/year in lab air | <±0.05 |
Sensitivity | drift % change/year in lab air, monthly test | <10 |
Operating | life months until 80% original signal (24 month warranted) | > 24 |
PH3-A1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL | ||
Sensitivity @ -20°C | %(output @ -20°C/output @ 20°C) @ 11ppm PH3 | 20 to 70 |
Sensitivity @ 50°C | % (output @ 50°C/output @ 20°C) @ 5ppm PH3 | 130 to 160 |
Zero @ -20°C | ppm equivalent change from 20°C | <±0.04 |
Zero @ 50°C | ppm equivalent change from 20°C | <±0.04 |
PH3-A1 Phosphine Sensor PH3 Sensor CROSSSENSITIVITY | ||
H2S sensitivity | % meaured gas @ 20ppm H2S | <15 |
NO2 sensitivity | % meaured gas @ 10ppm NO2 | <-30 |
Cl2 sensitivity | % meaured gas @ 10ppm Cl2 | <-30 |
NO sensitivity | % meaured gas @ 50ppm NO | <1 |
SO2 sensitivity | % meaured gas @ 20ppm SO2 | <60 |
CO sensitivity | % meaured gas @ 400ppm CO | <0.7 |
H2 sensitivity | % meaured gas @ 400ppm H2 | <0.2 |
C2H4 sensitivity | % meaured gas @ 80ppm C2H4 | <10 |
NH3 sensitivity | % meaured gas @ 25ppm NH3 | <0.2 |
CO2 sensitivity | % meaured gas @ 5% vol CO2 | <0.1 |
PH3-A1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS | ||
Temperature range | °C | -30 to 50 |
Pressure range | kPa | 80 to 120 |
Humidity range | % rh continuous | 20 to 90 |
Storage period | months @ 0 to 20°C (stored in original container) | 6 |
Load resistor | Ω | 10 to 33 |
Weight | g | <6 |
Matched Transmitter board for PH3-A1 PH3 Sensor
4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change
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